TRIODE SPUTTER ION PUMPS 
FOR CREATING UHV

Triode Sputter Ion Pumps

These pumps are used to create UHV in charged particle accelerators, surface analytical spectrometers, mass spectrometers etc.Technology for 35, 70, 140 & 270 LPS capacity pumps.
Easy maintenance - Dismantle type body feature except for 35 LPS design 

 INTRODUCTION

The triode sputter ion pumps are employed to create hydrocarbon-free ultra high vacuum. They utilise the high intensity cold cathode discharge produced in a magnetic field to sputter a highly reactive metal. The reactive metal layer called getter film combined with the active gas molecules such as hydrogen, nitrogen, oxygen, water vapour etc to form low vapour pressure stable compounds, thus reducing the number of gas molecules and hence gas pressure in the system volume. 

These pumps operate in the pressure range 10 -3 to 10-10 Torr. They do not require the services of a backing pump continuously but only need initial forepressure of 10-3 Torr. The discharge current being proportional to the background pressure, the pumps also serve as pressure measuring gauges.

These pumps have higher pumping capacity for inert gases compared to its predecessor diode sputter ion pump. These pumps can be mounted on a system in any orientation.

 APPLICATIONS

The triode sputter ion pumps are used to create ultra high vacuum in charged particle accelerators, surface analytical spectrometers, mass spectrometers etc. R&D institutes, universities may require such types of pumps. 

SPECIFICATIONS

Pump Type TSIP-35 TSIP-70 TSIP-140 TSIP-270

Pumping Speed (1/s) 

 For N2 35 70 140 270
For Ar 8 16 32 60
Starting Pressure (Torr) < 5x10-3 < 5x10-3 < 5x10-3 < 5x10-3
Ultimate Pressure (Torr)  5x10-10 5x10-10 5x10-10 5x10-10
Baking Temp.With magnets (°C) 250 250 250 250
Connecting flange NB 63 CF 100 CF 150 CF 150 CF
Magnetic Field (Gauss) 1200 1200 1200 1200
Stray magnetic field at Flange (Gauss) < 2 < 2 < 2 < 2
No. of sputtering Assemblies 1 2 4 4
Max. Operating Voltage (kv) 6.2 6.2 6.2 6.2
Short Circuit Current (mA) 100 200 500 750
Weight (kg.) 20 33 52 82


    For details contact :
       

        Head, Technology Transfer & Collaboration Division,
        BHABHA ATOMIC RESEARCH CENTRE,
        TROMBAY, MUMBAI - 400 085
        Fax : 091-022-25505151
        Email : technology@barc.gov.in

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