Compact SMPS based Sputter Ion Pump Power Supply
This supply can be used with Triode Sputter Ion Pumps having pumping speeds up to 140 lps and for Thin film deposition by DC magnetron sputtering technique. Sputter ion pumps find extensive use in high vacuum systems where a “clean” vacuum is desired. They are used in scanning probe microscopy and other high-precision apparatuses.
Conventional Sputter ion pump power supplies tend to be heavy and bulky as they operate on the mains frequency viz. 50Hz. The compact switched mode triode sputter ion pump power supply made in BARC is based on a half bridge dc to dc converter operating at 20kHz resulting in a drastic size reduction of around 75% over conventional mains frequency operated ion pump power supplies. Our compact SMPS triode sputter ion pump power supply is rated for an open circuit voltage in the range of -6kV to -7kV with a short circuit current rating of 200mA. This supply can power triode sputter ion pumps of ratings up to 140 liters / second. A microcontroller circuit is used to display the various parameters, implement the Trip logic and provide a PC interface..
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